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Parameter Specification
Model GHEXA-GRP-EQP-AUT-002
Power Supply AC 220V / 50 Hz + Ground; Total Power: 7 kW, Rated Power: 2 kW
Compressed Air 0.6–0.7 MPa, Hose OD Φ10 mm
External Water Supply <0.3 MPa, Pipe OD Φ10 mm
Drainage Drain Pipe OD 32 mm
Sample Mounting Box Sizes 39×47×12 mm / 30×27×12 mm; Max Quantity: 21
Alignment System 25 Megapixel CCD Camera; Field of View: 35×35 mm; Grinding Precision: ±10 μm
Laser Marking/Reading Yes; Max Number of Lines: 30; Line Drawing: Specified distance translation
Grinding/Polishing Stations 2 Stations; Disc Diameter: Φ254 mm; Rotation Speed: 100–1000 rpm; Motor: 1 kW
Grinding Head Holds 3 Samples; Motor: 0.4 kW; Speed: 0–360° reciprocating swing; Pressure: 5–100 N
Dispensing System 4 Groups × 1.8 L each; Flow Rate: 0–50 ml/min; Mechanical Stirring: 2 Groups; Liquid Level Alert: Yes
Disc Storage 20 Grinding/Polishing Discs; Disc Life Alert: Usage count or force-based
Cleaning Station Water Rinse + Ultrasonic + High-Speed Spin-Dry + Independent Air Blow-Dry
Control System PLC + 15-inch Main Screen + 7-inch Auxiliary Screen; Dual 24-inch Computer Displays
Safety Features Emergency Stop, Safety Door Lock (PLd level), Three-Color Alarm Light
Program Library 30 Program Groups; Max 10 Steps per Program; End Conditions: Remaining/Grind Amount (min 0.001 mm) or Time
Grinding Modes By Pressure (0–100 N) or Speed (min 0.001 mm/s)
Sample Output Face-up, orderly arranged in recovery tray to prevent surface scratching
Dimensions (Screen & Light Folded) 2400 × 1320 × 2000 mm
Weight 1500 kg
Parameter Specification
Technique Focused Ion Beam (FIB)
Ion Source Gallium (Ga⁺) ion beam
Milling Resolution Nanometer-scale precision
Operating Modes Milling, polishing, deposition
Imaging Support SEM-assisted navigation
Deposition Protective layers (Pt / C)
Sample Geometry Bulk, thin films, devices
Site Specificity Yes (ROI-targeted)
Sample Preparation TEM lamella, APT needle, cross-section
Information Enabled Access to buried interfaces and defects
Typical Use Cases Semiconductor devices, multilayers, interfaces
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